Cahng Liu,Vaishali B Mungurwadi,Anil V. Nandi <br/><br/>
Foundations of MEMS 

 - 2nd 
 - Newdelhi  Pearson  2012 
 - 576 
<br/><br/><label>ISBN: </label>9788131764756 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRONICS
<br/><br/><label>Dewey Class. No.: </label>621.381  / LIU/F