TY  - BOOK
AU  - Cahng Liu,Vaishali B Mungurwadi,Anil V. Nandi
TI  - Foundations of MEMS
SN  - 9788131764756
U1  - 621.381 
PY  - 2012///
CY  - Newdelhi
PB  - Pearson
KW  - ELECTRONICS
ER  -