000 00410nam a2200157Ia 4500
008 220223s9999 xx 000 0 und d
020 _a9780070487093
082 _a621.381
_bHSU/M
100 _aTai-RAn Hsu
245 0 _aMEMS and Microsystems Design and Manufacture
250 _a1st
260 _aNewdelhi
_bMcgrawhill Education India Pvt Ltd
_c2002
300 _a436
650 _aELECTRONICS
942 _cBK
999 _c2694
_d2694